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金刚石、碳纳米管、碳纳米管/纳米金刚石复合物的制备及生长机制研究
引用本文:秦宏宇,徐强,杨光敏. 金刚石、碳纳米管、碳纳米管/纳米金刚石复合物的制备及生长机制研究[J]. 物理实验, 2011, 31(7)
作者姓名:秦宏宇  徐强  杨光敏
作者单位:1. 长春工程学院勘查与测绘工程学院,吉林长春,130022
2. 长春师范学院物理学院,吉林长春,130032
摘    要:采用PECVD技术,通过对基片使用不同的预处理方法和沉积参数,合成了金刚石、碳纳米管及碳纳米管/纳米金刚石复合物.利用SEM,TEM,拉曼光谱对样品的形貌、成分和结构进行了研究.结果表明,在制备样品的过程中,基片的预处理方法和CH4/H2流量比至关重要,它们将影响所制得样品的晶粒大小、形核密度以及微观结构.

关 键 词:金刚石  碳纳米管  碳纳米管/纳米金刚石的复合物  等离子体增强化学气相沉积

Synthesis and growth mechanism of diamond,CNTs and CNTs/nanodiamond composites
QIN Hong-yu,XU Qiang,YANG Guang-min. Synthesis and growth mechanism of diamond,CNTs and CNTs/nanodiamond composites[J]. Physics Experimentation, 2011, 31(7)
Authors:QIN Hong-yu  XU Qiang  YANG Guang-min
Affiliation:QIN Hong-yu1,XU Qiang1,YANG Guang-min2 (1.School of Prospecting and Surveying Engineering,Changchun Institute of Technology,Changchun 130022,China,2.College of Physics,Changchun Normal University,Changchun 130032,China)
Abstract:Diamond,CNTs,CNTs/Nanodiamond composites were synthesized by PECVD,via different nucleation pretreatment schemes and deposition conditions.The morphology,structure and composition of the samples were investigated with SEM,Raman,TEM and HRTEM.The results showed that substrate pretreatment and deposition conditions had a significant influence on the grain size,nucleation density,and microstructure of the obtained films
Keywords:diamond  CNT  CNT/nanodiamond composite  PECVD  
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