| SiO2半波覆盖层对HfO2/SiO2高反膜激光损伤的影响 |
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| 引用本文： | 胡建平,邱服民,付雄鹰,曾勋.SiO2半波覆盖层对HfO2/SiO2高反膜激光损伤的影响[J].强激光与粒子束,2001,13(2). |
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| 作者姓名： | 胡建平 邱服民 付雄鹰 曾勋 |
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| 作者单位： | 成都精密光学工程研究中心, 四川 成都 610041 |
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| 摘 要： | 研究了SiO2半波覆盖层对HfO2/SiO2高反射膜1064nm激光损伤的影响，分析薄膜的激光损伤特性及图貌得出, 对于单脉冲（1-ON-1）激光损伤，SiO2半波覆盖层能提高HfO2/SiO2高反膜的激光损伤阈值；可显著降低激光损伤程度，减小灾难性损伤发生的概率；可大幅度提高HfO2/SiO2高反膜膜的抗激光损伤能力。
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| 关 键 词： | SiO2半波覆盖层 激光损伤阈值 损伤图貌 高反射膜 |
| 收稿时间： | 1900-01-01; |
Effect of l / 2 silica overcoat on laser damage of HfO2 /SiO2 high reflector coating |
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| hu jian-ping,qiu fu-ming,fu xiong-ying,zeng xun.Effect of l / 2 silica overcoat on laser damage of HfO2 /SiO2 high reflector coating[J].High Power Laser and Particle Beams,2001,13(2). |
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| Authors: | hu jian-ping qiu fu-ming fu xiong-ying zeng xun |
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| Institution: | Chengdu Fine Optical Engineering Research Center, P.O.Box 450, Chengdu 610041, China |
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| Abstract: | The laser damage of HfO2 /SiO2 high reflector coating with and without l /2 silica overcoat was studied in detail respectively, the damage threshold and possibility was measured by using a 1064nm longitude mode, 10ns Nd: YAG laser, the laser damage size and morphology were observed and analyzed by using a Normaski microscope, main conclusions are as follows: (1) The l / 2 silica overcoat does affect laser damage threshold of HfO2 /SiO2 high reflector coating significantly，and increase the laser damage threshold of coating up to 1.5 times; (2) According to laser damage morphologies, l / 2 silica overcoat can reduced the serious damage of HfO2 /SiO2 high reflector coating, and prevent catastrophic damage of the hafnia top layer; (3) For multi-shot laser pulse, l / 2 silica overcoat can grea |
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| Keywords: | laser damage morphology damage threshold high reflecting coating |
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