| 纳米晶SnO2透明导电薄膜的研制 |
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| 引用本文： | 王占和,郝群,祝侃.纳米晶SnO2透明导电薄膜的研制[J].光学技术,2001,27(1). |
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| 作者姓名： | 王占和 郝群 祝侃 |
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| 作者单位： | 1. 北京理工大学 电子工程系,
2. 北京理工大学 光电工程系, |
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| 基金项目： | 国家留学回国人员科研启动基金资助项目!(367 3) |
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| 摘 要： | 阐述了金属氧化物透明导电薄膜研究的发展情况及其应用前景。介绍了采用磁控溅射技术 ,使用混合气体Ar和O2 ,在衬底温度为 15 0～ 40 0℃的耐热玻璃基片上制备纳米晶SnO2 :Sb透明导电薄膜 ,通过测定X射线衍射谱 ,表明薄膜择优取向为 110 ]和 2 11]方向。测量了SnO2 :Sb薄膜的导电特性随衬底温度及氧分压的变化。光学特性测量结果表明薄膜具有较高的透过率。
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| 关 键 词： | 磁控溅射 SnO_2薄膜 导电特性 光学透过率 |
Study of nanocrystalline SnO2 transparent conducting film |
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| WANG Zhan-he,HAO Qun,ZHU Kan.Study of nanocrystalline SnO2 transparent conducting film[J].Optical Technique,2001,27(1). |
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| Authors: | WANG Zhan-he HAO Qun ZHU Kan |
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| Abstract: | Antimony doped nanocrystalline Tin oxide transparent conducting films grown by d c magnetron sputtering in a mixture gas of Ar and O2, and substrate temperatur e 150～400℃. The films were characterized by X-ray diffracting. The films sh owed preferred orientation in ［110］ or ［211］ plane. The conductivity of fil m s depends on the substrate temperature and Ar/O2. The optical properties were studied by resistivity and transmittance. The research and application prospect s of metallic oxide transparent conducting films were reviewed too. |
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| Keywords: | magnetron sputtering SnO 2 film conductivity transmittanc |
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