Plasma etching of III–V semiconductors in BCl3 chemistries: Part II: InP and related compounds

BCl₃/Ar and BCl₃/N₂ plasma chemistries were compared for patterning of InP, InAs, InSb, InGaAs, InGaAsP, and AlInAs. Under electron cyclotron resonance conditions etch rates in excess of 1 µm/min can be achieved at room temperature with low additional rf chuck power (150 W). The etch rates are similar for both chemistries, with smoother surface morphologies for BCl₃/Ar. However, the surfaces are still approximately an order of magnitude rougher (as quantified by atomic force microscopy) than those obtained under the same conditions with Cl₂/Ar. InP surfaces etched at high BCl₃-to-Ar ratios have measurable concentrations of boron-and chlorine-containing residues.