楔条形阳极收集器的参量设计与工艺优化

分析了楔条形阳极收集器各参量对探测器主要性能的影响,研究了圆形收集器的设计方法,制定并优化了相应的制作工艺.以此为基础,设计和制作了两块有效探测面积Φ48 mm、周期1.2 mm、绝缘沟道宽度30 μm、电极厚度分别为1 μm和2 μm的圆形收集器.通过对比和分析这两块收集器的电阻和电极电容值以及相应的成像实验,验证了上述研究方法的正确性和“先光刻腐蚀后电镀增厚”工艺方案的可行性.

Parameter Design and Technics Optimization of Wedge and Strip Anodes Collector

The effect of many parameters for WSA collector on the primary performance indexes of detector were analysed, a design method of circular collector was studied. A corresponding implementary scheme on technics was proposed and optimized. On these basises, two circular collectors, one′s electrode thickness is 1 μm and the other′s is 2 μm, have been designed and factured. The detecting area of the two collectors are Φ48 mm, the periods are 1.2 mm, and the widths of insulating gap are 30 μm. It is proved that all above proposed methods are correct and the implementary scheme on technics, electroplating after photo-lithography and chemical etching, is feasible by measuring, analysing, and imaging test.