| 磷酸盐激光玻璃聚(CH3)2 Si(OC2 H5)2防潮膜 |
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| 引用本文： | 刘瑞军,李海元,唐永兴,朱健强. 磷酸盐激光玻璃聚(CH3)2 Si(OC2 H5)2防潮膜[J]. 光学学报, 2005, 25(11): 577-1580 |
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| 作者姓名： | 刘瑞军 李海元 唐永兴 朱健强 |
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| 作者单位： | 中科院上海光学精密机械研究所高功率激光物理国家实验室,上海,201800;中科院上海光学精密机械研究所高功率激光物理国家实验室,上海,201800;中科院上海光学精密机械研究所高功率激光物理国家实验室,上海,201800;中科院上海光学精密机械研究所高功率激光物理国家实验室,上海,201800 |
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| 基金项目： | 国家863计划（863-804-2）资助课题.致谢：本论文的测试工作得到了黄美英老师、沈卫星和杨镜新老师的帮助,在此表示衷心感谢. |
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| 摘 要： | 以（CH3）2Si（OC2H5）2为前驱体，采用溶胶-凝胶与有机合成相结合的方法，制得稳定性良好的涂膜液。采用旋转涂膜法在掺钕磷酸盐激光玻璃棒端面涂制防潮膜，膜层固化后透过率达96．5％，获得的膜层表面粗糙度优良，均方根表面粗糙度（RMS）为1．659nm，平均粗糙度（RA）平均为1．321nm；在激光波长1053nm，脉冲宽度1 ns条件下膜层的激光破坏闽值可达10～14 J／cm^2。经过“神光Ⅱ”高功率激光器物理实验运行，膜层使用期为五年，并且已经在我国“神光Ⅲ”原型装置上试用。
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| 关 键 词： | 薄膜光学 溶胶-凝胶 有机硅 防潮膜 激光破坏阈值 |
| 文章编号： | 0253-2239（2005）11-1577-4 |
| 收稿时间： | 2004-09-29 |
| 修稿时间： | 2005-04-29 |
Moistureproof Film of Polymeric (CH3)2Si(OC2H5)2 on Phosphate Laser Glass |
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| Liu Ruijun,Li Haiyuan,Tang Yongxing,Zhu Jianqiang. Moistureproof Film of Polymeric (CH3)2Si(OC2H5)2 on Phosphate Laser Glass[J]. Acta Optica Sinica, 2005, 25(11): 577-1580 |
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| Authors: | Liu Ruijun Li Haiyuan Tang Yongxing Zhu Jianqiang |
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| Affiliation: | National Laboratory of High Power Laser Physics, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800 |
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| Abstract: | (CH3)2Si(OC2H5)2 as precursor, a sol of good stability is prepared by sol-gel method and organic synthesization. After the sol is coated it on phosphate laser glass by rotating way, moistureproof film is worked out, having a transmittance of 96.5% after heated. The film has a good morphology, roughness of mean square (RMS) of 1.659 nm and roughness of average (RA) of 1.321 nm. The damaged threshold of the moistureproof film is high to 10～14 J/cm2, tested by a laser of wavelength of 1053 nm and pulse width of 1 ns. In the period of 5 years on “Shenguang Ⅱ” high power laser equipment, it behaves good moistureproof performance , and tryouts on “Shenguang Ⅲ” model. |
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| Keywords: | thin films optics sol-gel organic silicon moistureproof film laser-damaged threshold value |
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