| 一体型平行弹簧扫描隧道显微镜 |
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| 引用本文： | 张海成,佐佐木彰.一体型平行弹簧扫描隧道显微镜[J].光学学报,1995,15(7):17-922. |
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| 作者姓名： | 张海成 佐佐木彰 |
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| 作者单位： | 长春光学精密机械学院光电工程系 |
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| 摘 要： | 描述了一种新结构形式的扫描隧道显微镜系统。该系统使用一体型平行弹簧和压电致动元件作为精密二维位置控制器件，使得ｘ轴和ｙ轴间的位移干扰变得极其微小。控制ｚ轴位移及试件与探针间距的压电致动元件是以悬挂方式固定在一体型平行弹簧上的，因此，对ｚ轴的位移干扰亦忽略。
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| 关 键 词： | 扫描隧道显微镜 一体型平行弹簧 |
| 收稿时间： | 1994/5/10 |
Scanning Tunneling Microscope Using a Momolithic Parallel Spring |
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| Zhang Haicheng.Scanning Tunneling Microscope Using a Momolithic Parallel Spring[J].Acta Optica Sinica,1995,15(7):17-922. |
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| Authors: | Zhang Haicheng |
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| Abstract: | This paper describes a novel scanning tunnling microscope (STM) system usinga two-dimensional monolithic Paranel spring (MPS) and piczo-electric actuators (PZT)for precision two-dimensional positioning. This leads the interference between the x-axisdisplacement and the y-axis to be very small. The PZT used for controlling the z-axisdisplacement and the sample-to-tip distance is mounted on the monolithic parallel spring.Therefore, the mutual interference to z-axis displacements is negligible. |
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| Keywords: | scanning tuneling microscope monolithic parallel spring |
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