用能化电子效应考察二次离子的发射机理

用能化电子改变样品的表面势,测量多种二次离子产额的能谱,发现在通常条件下,特别当存在氧增强发射时,离子的存活几率不为共振电子隧道效应所影响。动力学参量的数据表明,决定离子产额的表面势是高度局域的。并可推论电子束照射对二次离子质谱的定量分析可起有益的效用。关键词：

THE MECHANISM OF THE SECONDARY ION EMISSION INVESTIGATED BY THE EFFECT OF ENERGETIC ELECTRONS

The surface potential of the sample was changed by the irradiation of energetic electrons. The energy spectra of varieties of sputtered ion species were measured with different surface potential. It was found that under conventional condition, particularly when there was oxygen enhanced emission, the resonant electron tunneling would not reduce the savival probability of sputtered ions. The energy spectra were also used to investigate the dynamic aspect of the ion emmission. The dynamic parameters indicated that the surface potential which the ion yield depended on was highly localized. In addition, the electron irradiation could be helpful in improving the quatitative analysis of the SIMS even for metals.