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| 显微栅线投影法用于微镜转角测量 | |
| 引用本文： | 康新,董萼良,何小元. 显微栅线投影法用于微镜转角测量[J]. 光子学报, 2004, 33(12): 1500-1503 |
| 作者姓名： | 康新 董萼良 何小元 |
| 作者单位： | 南京理工大学理学院力学与工程科学系,南京,210094;东南大学土木工程学院工程力学系,南京,210096 |
| 基金项目： | 国家863计划资助项目(2002AA404140) |
| 摘 要： | 采用显微栅线投影法结合相移技术测量了微镜在不同驱动电压下的转角,并同理论值进行了比较,平均误差为4.5%,结果表明:测量值和理论值比较吻合. |
| 关 键 词： | 微镜 驱动电压 转角 栅线投影法 |
| 收稿时间： | 2004-07-06 |
| 修稿时间： | 2004-07-06 |
The Measurement of Rotation Angle of Micro-mirror Using Fringe Projection |
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. The Measurement of Rotation Angle of Micro-mirror Using Fringe Projection[J]. Acta Photonica Sinica, 2004, 33(12): 1500-1503 |
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| Authors: | |
| Affiliation: | (1 Department of Mechanics and Engineering Science, Nanjing University of Science and Technology, Nanjing 210094) (2 Department of Engineering Mechanics, Southeast University, Nanjing 210096) |
| Abstract: | The fringe projection method is adopted to measure the rotation angle of the micro mirror which is driven by pull in voltage, and the measurement results are compared with the results obtained by theoretical analysis. It is shown that the experimental results are in good agreement with the theoretical analysis. |
| Keywords: | Micro-mirror Pull-in voltage Rotation angle Fringe projection method |
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