Influence of substrate temperature on the chemical and microstructural properties of MO-CVD ZrTiO4 thin films |
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Authors: | G. Padeletti A. Cusmá G.M. Ingo A. Santoni S. Loreti C. Minarini M. Viticoli |
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Affiliation: | (1) CNR-Istituto per lo Studio dei Materiali Nanostrutturati, cp 10, 00016 Monterotondo Staz., Roma, Italy, IT;(2) Dip. di Scienze e Tecnologie Chimiche, Università di Roma “Tor Vergata”, Roma, Italy, IT;(3) Enea-Centro Ricerche Frascati, Frascati, Roma, Italy, IT;(4) Dip. di Chimica, Università di Catania, Catania, Italy, IT;(5) Enea-CR Partici, Napoli, Italy, IT |
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Abstract: | In the last few years, intensive research activity has been focused on the development of suitable synthesis methods for high-permittivity materials, used for the realization of next-generation microdevices able to fulfil the previsions of the Technology Roadmap of Semiconductors. The use of high-permittivity materials can overcome the difficulties concerning the production of SiO2-based ultra-thin dielectrics, such as the generation of pinholes and the non-uniformity of the film, which may result in a malfunction in high-density systems. Recently, zirconium titanate thin films were discovered to have very interesting dielectric properties, which suggests a use for them in microwave integrated systems, such as receivers or DRAMs, since they are monophasic, have little dissipation and show a good thermal stability and a high value for the dielectric constant, independent of frequency in the range from kilohertz to a few gigahertz. Real application is possible only in strict connection with the development of a suitable preparation method which allows production with controlled and reproducible characteristics. In this work, the synthesis and characterization of ZrxTi1-xO4 (ZT) thin films grown via MO-CVD is described, studying the influence of growth parameters on their structural, chemical and physical properties. Received: 17 June 2002 / Accepted: 24 June 2002 / Published online: 4 November 2002 RID="*" ID="*"Corresponding author. Fax: +39-06/9067-2445, E-mail: Pad@mlib.cnr.it |
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Keywords: | PACS: 68.55.Jk 68.55.Nq 81.15.Gh 77.84.Dy 68.37.Ps |
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