Analysis of thermal effects accompanying the interaction of electron beams with ferroelectric crystals

A spatial nonstationary temperature distribution in a model ferroelectric specimen exposed to electron beams of a scanning electron microscope (SEM) is simulated. A solution to the problem on the effect of focused heat sources having different configurations on a single ferroelectric crystal and crystal with electrodes deposited on its faces is presented. The model is based on the finite-difference method. A program for calculating temperature fields and maximum overheating temperature for preset specimen characteristics and experimental parameters of different scanning electron microscopes is suggested.