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Kinetics of the decomposition of disilane on a silicon growth surface into two non-identical radicals |
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| Authors: | L K Orlov S V Ivin |
| Institution: | 1.Nizhny Novgorod State Technical University,Nizhny Novgorod,Russia;2.Institute for Physics of Microstructures,Russian Academy of Sciences,Nizhny Novgorod,Russia |
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