| 三代微光管防离子反馈Ａｌ２Ｏ３ 膜电子轰击放气成分分析 |
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| 引用本文： | 徐江涛,程耀进,闫磊,刘蓓蓓,祝婉娉,刘峰. 三代微光管防离子反馈Ａｌ２Ｏ３ 膜电子轰击放气成分分析[J]. 应用光学, 2012, 33(6): 1109-1112 |
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| 作者姓名： | 徐江涛 程耀进 闫磊 刘蓓蓓 祝婉娉 刘峰 |
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| 作者单位： | 1.１．微光夜视技术重点实验室,陕西 西安 ７１００６５; |
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| 摘 要： | 为了解决防离子反馈Ａｌ２Ｏ３膜污染对三代微光管ＧａＡｓ光电阴极灵敏度的影响，用四级质谱计对制管超高真空室残气、无膜微通道板（ＭＣＰ）和带Ａｌ２Ｏ３膜ＭＣＰ在电子轰击时的放气成份进行分析。结果表明，带Ａｌ２Ｏ３膜ＭＣＰ放出有对阴极光电发射有害的Ｃ、ＣＯ、ＣＯ２、ＮＯ、Ｈ２Ｏ２和ＣXＨY化合物，它们来源于Ａｌ２Ｏ３膜制备过程的质量污染。经过对制膜工艺质量进行改进，制备出了放气量小于２１０－９ Ｐａ且无ＣＸＨＹ化合物气体的Ａｌ２Ｏ３膜。
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| 关 键 词： | Ａｌ２Ｏ３膜 防离子反馈 ＭＣＰ 电子轰击 质量污染 |
Gas composition released from ion barrier Al2O3 film of third-generation LLL tube under electron bombardment |
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| XU Jiang-tao , CHENG Yao-jin , YAN Lei , LIU Bei-bei , ZHU Wan-ping , LIU Feng. Gas composition released from ion barrier Al2O3 film of third-generation LLL tube under electron bombardment[J]. Journal of Applied Optics, 2012, 33(6): 1109-1112 |
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| Authors: | XU Jiang-tao CHENG Yao-jin YAN Lei LIU Bei-bei ZHU Wan-ping LIU Feng |
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| Affiliation: | 1.Key Laboratory of Science and Technology on Low-Light-Level Night Vision,Xi-an 710065,China;2.North Night-Vision Science &Technology Group Corp.,Ltd.,Kunming 650223,China |
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| Abstract: | In order to resolve the pollution effects of ion barrier Al2O3 film on GaAs photocathode sensitivity of third-generation low-light-level(LLL) tube ,we used the quadrupole mass spectrometer to analyze the gas composition released from the ultra-high vacuum chamber ,the microchannel plate(MCP) without film and the MCP with Al2O3 film under electron bombardment. The results show that the MCP with Al2O3 film releases the residual gases of C, CO, CO2, NO, H2O2 and CXHY, which come from the quality pollution during the preparation process of Al2O3 film .After improving the filming technology, we obtained the Al2O3 film with outgasing amount less than 2×10-9 Pa and without CXHY. |
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| Keywords: | Al2O3 film ion barrier MCP electron bombardment quality pollution |
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