Effect of annealing on the structural, optical and electrical properties of ZnO thin films by spray pyrolysis |
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Authors: | T Prasada Rao M C Santhosh Kumar and V Ganesan |
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Abstract: | Zinc oxide thin films have been deposited on glass substrates at a substrate temperature of 673 K by spray pyrolysis. The
samples are annealed in ambient atmosphere at various temperatures. The effect of annealing on structural, electrical, and
optical properties of ZnO films has been investigated. X-ray diffraction patterns show that crystallinity of the ZnO films
has been improved after annealing. The morphology of ZnO thin films is studied by atomic force microscopy. The tensile strain
(compressive stress) is found to decrease with increase in annealing temperature which indicates the relaxation of tensile
strain in ZnO thin films. A decrease in energy band gap is observed with increase of annealing temperature. The mechanism
of blue-green luminescence of ZnO thin film has been analyzed. The resistivity is found to decrease with annealing temperature. |
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