反向流动垂直喷淋式MOCVD反应器设计与数值模拟

本文分析了现有的MOCVD反应器存在的不足,提出了一种新型的反向流动垂直喷淋式反应器:反应气体从基片上方的许多平行小喷管喷入反应区,反应后的尾气又从基片上方出口排出,从而减少了反应物浓度沿衬底径向的不均匀性.通过对反应器进行三维数值模拟,改变喷管的中心距、喷管端与衬底的距离、流量、气体压强等参数,确定了反应室内衬底上方温度场与浓度场为最佳时的参数组合.

Design and Simulation of Reverse-flow Showerhead MOCVD Reactors

The shortcomings of current MOCVD reactors are discussed and a novel reverse-flow showerhead MOCVD reactor is proposed in this paper. In the reactor the reactants were sprayed from showerheads above the substrate, and the exhausts were expelled to the outlet also located above the substrate. Thus the reactant concentration uniformity along the radial direction was improved. A threedimensional simulation of flow phenomena in the reactor was conducted. By varying the distance between adjacent spraying tubes, the distance between the tubes and substrate, flow rates of reactants and pressure, the optimized temperature and concentration fields above the substrate were obtained.