大非球面镜的郎奇检验灵敏度理论研究及仿真分析

为了研究等间距直线条光栅的周期及其他相关参数的变化对大非球面镜朗奇检验法的影响，提出了一种评估郎奇检验灵敏度大小的新方法。其检验灵敏度定义为一个光栅周期所能检测到的镜面偏差大小能力。在朗奇检验的几何原理基础上，利用光线追迹法讨论了镜面偏差与朗奇光栅周期之间的关系，并以此推导出检验灵敏度公式，计算了抛物面镜的朗奇检测灵敏度。分析结果表明，如果给定镜子的规格参数及检验光路，朗奇检验灵敏度分别随着光栅周期间隔和半通光口径的变大而减小。

Theoretical Research and Simulated Analysis on Sensitivity of Ronchi Test for Aspherical Surfaces

In order to research the effects on Ronchi test result of aspherical mirrors caused by different types of ruling periods and other relative factors, a new kind of method is advanced to evaluate the sensitivity of Ronchi test, which can be defined as the capability of testing the surface errors for a ruling period. The formula of test sensitivity is calculated and coneluded by ray tracing method based on the geometrical principle of Ronchi test after discussing the relationship between the mirror deviation and Ronchi ruling period. Applying the formula to parabolic mirrors and giving the corresponding parameters of mirror and the test arrangement for ray, a conclusion can be drawn that, the sensitivity of the test decreased with the period space of Ronchi ruling and the aperture radius separately.