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Structure of sputter-deposited Pt/Fe and Cr/Fe multilayers
Authors:D. L. Williamson  B. M. Lairson  A. P. Payne  N. M. Rensing  B. M. Clemens
Affiliation:(1) Physics Department, Colorado School of Mines, 80401 Golden, CO, USA;(2) Department of Materials Science and Engineering, Stanford University, 94305 Stanford, CA, USA;(3) Department of Applied Physics, Stanford University, 94305 Stanford, CA, USA
Abstract:Conversion electron Mössbauer spectroscopy (CEMS) and X-ray diffraction (XRD) have been used to investigate the structure of Pt/Fe and Cr/Fe multilayers deposited by magnetron sputtering. The Cr/Fe samples consisted of four samples prepared under Ar sputtering pressures of 1.3, 3.0, 5.0, and 10.0 mT, all with the same multilayer structure of 3.5 nm Cr/2.5 nm Fe, repeated 35 times onto c-Si wafer substrates. The quality of the interfaces between Cr and Fe is clearly degraded with increasing sputter pressure, as seen by changes in the relative intensities of four magnetic subspectra in the CEMS and the gradual appearance of a single-line resonance similar to Fe in solution in Cr. The low-angle XRD superlattice peaks also disappear with increasing sputter pressure, while the high-angle XRD shows a tendency for loss of the preferred (110) texture. Two films of Pt/Fe were deposited epitaxially onto MgO single crystals with bilayer periods of 1.3 nm and 2.6 nm and total thickness of 300 nm each. A transition from fcc-PtFe with near-perpendicular magnetic anisotropy to a bcc-Fe/fcc-PtFe mixture with in-plane magnetic texture is observed by CEMS for the factor of two increase in bilayer period.
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