Improved magnetic properties of SmCo-based films deposited on hot Si substrates |
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| Authors: | Yuanxun Li Long Peng |
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| Affiliation: | 1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;2. College of Optoelectronics Technology, Chengdu University of Information Technology, Chengdu 610225, China |
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| Abstract: | The SmCo-based films with different underlayers were deposited on Si substrates at 650 °C by magnetron sputtering process. Effect of different underlayers on the crystal structure and magnetic properties were investigated. The results show that the Al, Cu, and Ag underlayers can not make positive contributions on the crystal structure and magnetic properties. This is very different for the films with Mo and Cr underlayers, which exhibit well preferred orientation growth and improved magnetic properties. Especially, large intrinsic coercivity of 3.52 kOe and maximum energy product of 6.31 MGOe are observed for the films with Mo underlayers, which are found to be suitable for use in developed micro-magnetic devices from the high temperature aging results. |
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| Keywords: | SmCo film Underlayer Crystallization Coercivity |
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