Resolution enhancement at a large convergence angle by a delta corrector with a CFEG in a low-accelerating-voltage STEM |
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| Affiliation: | 1. JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan;2. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8565, Japan;1. School for the Engineering of Matter, Transport and Energy, Arizona State University, 501 E. Tyler Mall, Tempe, AZ 85287-6106, United States;2. Laboratoire de Physique des Solides, Université Paris-Sud, CNRS, UMR 8502, 91405 Orsay Cedex, France;1. University Service Centre for Transmission Electron Microscopy, Vienna University of Technology, Wiedner Hauptstrasse 8-10, A-1040 Wien, Austria;2. Thin Films and Physics of Nanostructures, Department of Physics, Bielefeld University, Universitätsstrasse 25, D-33615 Bielefeld, Germany;3. Department of Inorganic Chemistry, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany;4. Institute of Solid State Physics, Vienna University of Technology, Wiedner Hauptstrasse 8-10, A-1040 Wien, Austria;1. Laboratory for Ultrafast Microscopy and Electron Scattering, LUMES, ICMP, Ecole polytechnique fédérale de Lausanne, CH-1015 Lausanne, Switzerland;2. Department of Physics and Astronomy, UCLA, Los Angeles, CA 90095, USA;3. Eindhoven University of Technology, Department of Applied Physics, P.O. Box 513, 5600 MB Eindhoven, The Netherlands |
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| Abstract: | Resolution reduction by a diffraction limit becomes severe with an increase in the wavelength of an electron at a relatively low accelerating voltage. For maintaining atomic resolution at a low accelerating voltage, a larger convergence angle with aberration correction is required. The developed aberration corrector, which compensates for higher-order aberration, can expand the uniform phase angle. Sub-angstrom imaging of a Ge [1 1 2] specimen with a narrow energy spread obtained by a cold field emission gun at 60 kV was performed using the aberration corrector. We achieved a resolution of 82 pm for a Ge–Ge dumbbell structure image by high angle annular dark-field imaging. |
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| Keywords: | Ronchigram Higher-order aberration Corrector STEM |
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