Brewster’s angle method for absorption coefficient measurement of high-resistivity silicon based on CW THz laser

A simple method for measuring the absorption coefficient of low absorbing materials using CW THz laser was put forward. The method was based on transmittance measurements at the Brewster’s angle for p-polarized light, where the reflectance would be minimal, so interference caused by multiple reflections in the sample would be eliminated. Numerical simulations were carried out to evaluate errors in the proposed method. An experiment was also made to measure the absorption coefficient of high-resistivity Czochralski silicon at 118.83 μm by the method. Based on CW THz laser, the method offers a convenient way to measure the material absorption coefficient and has a low cost, so it shows promising application prospects.