Subsurface defect of amorphous carbon film imaged by near field acoustic microscopy |
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| Authors: | JT Zeng KY Zhao HR Zeng HZ Song LY Zheng GR Li QR Yin |
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| Institution: | (1) The State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, 200050, P.R. China |
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| Abstract: | Amorphous carbon films were examined by low frequency scanning-probe acoustic microscopy (LF-SPAM). Local elastic properties
as well as topography were imaged in the acoustic mode. Two kinds of subsurface defects were revealed by the LF-SPAM method.
The influence of the subsurface defects on the elastic properties was also discussed. The ability to image subsurface defects
was dependent on the scan area and the scan speed. Our results showed that the low frequency scanning-probe acoustic microscopy
is a useful method for imaging subsurface defects with high resolution.
PACS 68.37.Ps; 68.37.Uv; 61.43.Dq; 68.35.Gy |
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