| Abstract: | Plasma polymerization of chloromethyltrimethylsilane (CMTMS) was investigated by elemental analysis, infrared spectroscopy, and ESCA, and the modification of Cl substituents in the plasma polymers from CMTMS with sodium azide was discussed. CMTMS was plasma polymerized to yield filmy polymers. The polymer deposition rate was faster than that from tetramethylsilane containing no Cl atom. The plasma polymers from CMTMS were mainly composed of CH3, CH2, Si? CH3, Si? O? Si, and Si? O? C groups with a small amount of C? Cl groups. The Cl substituents incorporated into the plasma polymers were capable of substitution reactions with azide groups to form azide polymers. |
