| 压阻式力敏硅传感器的结构剖析 |
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| 引用本文： | 汤恒,唐世洪.压阻式力敏硅传感器的结构剖析[J].电子质量,2001(7):23-28. |
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| 作者姓名： | 汤恒 唐世洪 |
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| 作者单位： | 吉首大学物理与电子工程系 |
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| 摘 要： | 剖析了各种压阻式力敏硅传感器的结构，介绍了其工作原理和测试方法并，对力敏硅传感器结构的优劣作出分析，为合理地选择、应用力敏硅传感器提供了依据。
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| 关 键 词： | 力敏硅传感器 压阻效应 惠斯登电桥 结构 |
Analysis of Silicon Piezoresistive Sensor |
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| By: Tang Heng,Tena Shi-Hong.Analysis of Silicon Piezoresistive Sensor[J].Electronics Quality,2001(7):23-28. |
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| Authors: | By: Tang Heng Tena Shi-Hong |
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| Abstract: | In this paper, the structures of various piezoresistive sensors were presented. The working theory and test methods were introduced. And the advantages and shortcomings of different silicon piezoresistive sensor structures were analyzed to provide a reference for rational selection and application of silicon piezoresistive sensors. |
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| Keywords: | silicon piezoresistive sensor piezoresistance effect Wheatstone bridge |
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