Depth of formation of a reflected soft x-ray beam under conditions of specular reflection |
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Authors: | E. O. Filatova A. S. Shulakov V. A. Luk’yanov |
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Affiliation: | (1) Institute of Physics, St. Petersburg State University, 198904 Petrodvorets, Russia |
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Abstract: | Over a wide range of glancing-incidence angles, bremsstrahlung from an x-ray tube was used to measure the reflection spectra of an Si-SiO2 system with different dioxide thickness near the Si L 2,3 ionization threshold. The angular dependence of the depth of formation of the reflected soft x-ray beam was determined experimentally and compared with that obtained from a theoretical analysis of the interaction between electromagnetic radiation and the surface of an isotropic solid. Fiz. Tverd. Tela (St. Petersburg) 40, 1360–1363 (July 1998) |
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