Phase control of iron silicides using femtosecond laser irradiation |
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| Authors: | Shingo Kanehira Masaaki Sakakura Yasuhiko Shimotsuma Masaaki Eida Kiyotaka Miura Kazuyuki Hirao |
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| Institution: | (1) Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, Osaka 565-0871, Japan; |
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| Abstract: | Phase control of Fe–Si amorphous thin film in micro area is demonstrated using femtosecond laser irradiation. A femtosecond
laser beam with a high repetition rate over 200 kHz and tightly focused through an objective lens promotes both crystallization
and phase transformation from an amorphous phase into crystalline β-FeSi2, α-FeSi2, or ε-FeSi phases. Formation of each crystalline phase is possible by changing the pulse energy or the scanning speed of the incident
laser beam. |
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