| 基于隧道效应的微机械角速率传感器 |
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| 引用本文： | 裘安萍,苏岩,周百令. 基于隧道效应的微机械角速率传感器[J]. 中国惯性技术学报, 2000, 8(4): 75-79 |
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| 作者姓名： | 裘安萍 苏岩 周百令 |
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| 作者单位： | 东南大学,江苏,南京,210096 |
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| 摘 要： | 提出了一种基于隧道效应的微机械角速率传感器的设计方案,还针对隧穿检测和电容检测进行了比较。并指出基于隧道效应的微机械角速率传感器将极大提高传感器的灵敏度。
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| 关 键 词： | 隧道效应 微机械 角速率传感器 |
| 修稿时间： | 20000721 |
A TunnelingBased Micromachined Angular Rate Sensor |
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| QIU An-ping,SU Yan,ZHOU Bai-ling. A TunnelingBased Micromachined Angular Rate Sensor[J]. Journal of Chinese Inertial Technology, 2000, 8(4): 75-79 |
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| Authors: | QIU An-ping SU Yan ZHOU Bai-ling |
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| Abstract: | In this paper,a tunnelingbased micromachined angular rate sensor is put forward and designed.A brief comparison between tunnelingbased and capacitive sensors has been made.The paper presents that tunnelingbased microsensors can potentially provide a higher sensitivity using a simpler readout electronics for smaller device area than capacitive ones. |
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| Keywords: | tunnel effect micromachine angular rate senh |
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