Preparation of PZT Film and Powder by Sol-Gel Technique Using Ti- and Zr-Alkoxides and a Novel Pb-Precursor; Pb(NO3)2 1.5EO3

PZT (PbZr0.53Ti0.47O3) films and powders have been prepared by a precursor mixture containing Pb(NO3)1.5EO3 (EO3=triethylene glycol) and Zr- and Ti-methoxy ethanolates. The gel films have been deposited on Si/Ti/Pt substrates and on glass substrates from which they can easily be removed. The PZT films on the Si/Ti/Pt substrates were prepared with thicknesses up to 200 nm per layer after heating to 700°C. The phase development on heat-treatment of loose gel films to yield PZT was investigated by Powder-XRD, FT-IR, SEM-EDS, TEM-EDS, thermo-mass spectroscopy and DSC and the PZT was found to form in the region 550–700°C. PZT powders of 50–5000 nm sizes were prepared by hydrolysis under basic conditions and washing with water followed by heat-treatment to 650°C.