| 基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究 |
| |
| 引用本文： | 吴行阳,邓兆星,黄一鸣,华子恺,张建华.基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究[J].摩擦学学报,2014,34(6):684-688. |
| |
| 作者姓名： | 吴行阳 邓兆星 黄一鸣 华子恺 张建华 |
| |
| 作者单位： | 上海大学 机电工程与自动化学院, 上海 200072;上海大学 机电工程与自动化学院, 上海 200072;上海大学 机电工程与自动化学院, 上海 200072;上海大学 机电工程与自动化学院, 上海 200072;上海大学 机电工程与自动化学院, 上海 200072 |
| |
| 基金项目： | 国家自然科学基金(51075250)资助,基恩士(中国)有限公司在表面形貌测试方面给予了大力协助. |
| |
| 摘 要： | 采用溅射、反应溅射与RF-CVD技术相结合的多功率源沉积了梯度过渡层,在此基础上用RF-CVD法沉积了掺硅类金刚石膜,研究了梯度过渡层对薄膜结构、力学性能及水中摩擦学性能的影响.结果表明:梯度过渡层的引入可在一定程度上提高薄膜的sp3成分含量、硬度和杨氏模量,对增强膜基结合力,提高薄膜在水中的抗剥落性能有较显著的效果.
|
| 关 键 词： | 梯度过渡层 多功率源 非晶碳基薄膜 水润滑 摩擦磨损 |
| 修稿时间： | 3/3/2014 12:00:00 AM |
Preparation and Tribological Properties in Water of Si-DLC Film with Gradient Interlayer Deposited by Muti-Power Source Technology |
| |
| WU Xing-yang,DENG Zhao-xing,HUANG Yi-ming,HUA Zi-kai and ZHANG Jian-hua.Preparation and Tribological Properties in Water of Si-DLC Film with Gradient Interlayer Deposited by Muti-Power Source Technology[J].Tribology,2014,34(6):684-688. |
| |
| Authors: | WU Xing-yang DENG Zhao-xing HUANG Yi-ming HUA Zi-kai and ZHANG Jian-hua |
| |
| Institution: | School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China;School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China |
| |
| Abstract: | A gradient interlayer was deposited on stainless steel disk and silicon wafer by RF-CVD assisted sputtering and reactive sputtering method. Sequentially, a Si-DLC film was deposited on the interlayer by RF-CVD. The effect of the interlayer on the characteristics and tribological behaviors in water of the film was investigated. The results show that the presence of the gradient interlayer increased the content of sp3 carbons as well as the hardness and the Young's Modulus of Si-DLC slightly. The Si-DLC film with gradient interlayer showed higher failure-resistant capability comparing with the film without gradient interlayer. |
| |
| Keywords: | gradient interlayer multi-power source amorphous carbon films water lubrication |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《摩擦学学报》浏览原始摘要信息 |
| 点击此处可从《摩擦学学报》下载免费的PDF全文 |
|
