Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining |
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Authors: | Y. Cheng H.L. Tsai K. Sugioka K. Midorikawa |
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Affiliation: | (1) Laser-Based Manufacturing Laboratory, Department of Mechanical & Aerospace Engineering, University of Missouri-Rolla, 1870 Miner Circle, Rolla, MO 65409, USA;(2) Laser Technology Laboratory, RIKEN – The Institute of Physical and Chemical Research, Hirosawa 2-1, Wako, Saitama 351-0198, Japan |
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Abstract: | We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt |
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