Surface morphology and surface chemical states of epitaxial Pb(Zr0.95Ti0.05)O3 thin films grown on SrTiO3(100) by sputter deposition |
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Authors: | CJ Lu HM Shen YN Wang JH Gu |
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Institution: | (1) National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China (Fax: +86-25/3300535, E-mail: wyn@netra.nju.edu.cn), CN;(2) National Laboratory of Molecular and Biomolecular Electronics, Southeast University, Nanjing 210096, China, CN |
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Abstract: | 0.95 Ti0.05)O3 thin films of an orthorhombic perovskite structure were obtained on SrTiO3(100) substrates by radio frequency sputter deposition. The surface morphology of the films was investigated with atomic force
microscopy, scanning electron microscopy, and reflection electron microscopy. It is shown that the film surfaces are rather
bumpy. There are undulations of about 400 nm in length in an in-plane direction. The mean roughness perpendicular to the surface
is 39.6 nm, for the film thickness of 0.45 μm. The surface roughening was probably caused by island-shaped nucleation and
growth during the film growth. It has also been found that some gorges and a number of small pits remain at the film surfaces.
The surface chemical states of the films were characterized by using X-ray photoelectron spectroscopy. A Pb enrichment layer
and a large amount of adsorbed oxygen have been found at the surfaces of the films. Near the film surface Pb and Zr exist
mainly in the forms of, besides Pb(Zr,Ti)03, metal Pb, metal Zr, oxygen-chemisorbed Pb, and various lead oxides. In addition, a small amount of lead, whose binding energy
of Pb 4f7/2 is much lower than that of metal Pb, was observed at the film surfaces, but its chemical state is unknown up to now.
Received: 2 June 1997/Accepted: 22 September 1997 |
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Keywords: | PACS: 68 55 77 55 68 35 |
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