| Nanostructure and thermal-optical properties of vanadium dioxide thin films |
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| 作者姓名： | 李毅 易新建 张天序 |
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| 作者单位： | Department of Control Science and Engineering，Department of Optoelectronic Engineering，Institute for Pattern Recognition and Artificial Intelligence Huazhong University of Science & Technology，Wuhan 430074，Department of Optoelectronic Engineering，Institute for Pattern Recognition and Artificial Intelligence，Huazhong University of Science & Technology，Wuhan 430074，Department of Control Science and Engineering，Institute for Pattern Recognition and Artificial Intelligence，Huazhong University of Science & Technology，Wuhan 430074 |
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| 基金项目： | This research work was supported by the National Nature Science Foundation of China under Grant No. 60477040. |
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| 摘 要： | A novel nanopolycrystalline structure of vanadium dioxide thin films is deposited on silicon or fused silica substrates by reactive ion sputtering and followed by an annealing. The characteristic analysis shows that the films have a columnar nanostructure with an average grain of 8 nm. The resistivities as a function of ambient temperatures tested by four-point probes for as-deposited films present that the transition temperature for nanostructure of vanadium dioxide films is near 35 ℃ which lowers about 33 ℃ in comparison with the transition temperature at 68 ℃ in its microstructure.
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