电子束泵浦KrF激光MOPA系统的同步控制

 介绍研究出的MOPA系统完整的同步控制时间关联逻辑、各单元启动方式及同步系统的硬件。由Fe-Nb-Cu超微晶薄膜材料做成的同轴单匝磁开关及脉冲变压器产生大约150kV、上升时间小于200ns的高压，触发MOPA系统中的Marx发生器，当火花隙欠压比为90％时，Marx发生器中电压建立的时间抖动分别小于13ns和23ns。采用激光触发主开关时，泵浦功率系统总体抖动时间小于10ns，保证了整个电子束泵浦KrF激光MOPA系统的正常运行。

SYNCHRONIZATION CONTROL OF ELECTRON BEAM PUMPED KrF LASER MOPA SYSTEM

The aim of this research subject is to develop a precise time relationship logic for MOPAsystem, starting manner for every devices and some hard wires of the control system. Coaxial single turnmagnetic switch and pulse high voltage transformer can produce 150kV pulse high voltage with less than200us in rise time. The Marx generators in preamplifier and main amplifier of MOPA system are trigged withthis type of high voltages, the jitters of voltage developing time are less than 13us and 23us respectively,when the gas spark gaps in Marx are charged to 90% of their self breakdown voltage. When the main gasswitches in accelerators are trigged by KrF laser the jitter time less than 10us is achieved for whole pumpingpower system.