Exploration of variables in the fabrication of pyrolysed photoresist |
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Authors: | Callie Fairman Samuel S C Yu Guozhen Liu Alison J Downard D Brynn Hibbert J Justin Gooding |
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Institution: | (1) School of Chemistry, The University of New South Wales, Sydney, 2052, Australia;(2) MacDiarmid Institute for Advanced Materials and Nanotechnology, Department of Chemistry, University of Canterbury, Christchurch, 8140, New Zealand |
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Abstract: | The increased use of pyrolysed photoresist films (PPF) as electrode material intensifies the need to know what fabrication
variables are important in the pyrolysis process. The main factor effects of seven variables (three time/temperature heating
levels plus the position in the furnace tube) in the fabrication of PPF were investigated by a Plackett and Burman, eight-run,
experimental design. In the three-step pyrolysis programme, gas flow had a large effect on the surface cleanliness and roughness.
It was also observed that the position in the furnace affected the resistivity of the PPF. Fabrication parameters that give
rapid electron transfer to redox species in solution, that provide low surface oxide and that lead to low surface roughness
were identified. The guidelines on what fabrication conditions to employ to give a variety of different electrode characteristics
are presented. |
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Keywords: | Pyrolysed photoresist films Carbon electrodes Experimental design Plackett– Burman design |
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