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Structure and composition of secondary phase particles in cobalt-doped TiO2 films
Authors:B.-S. Jeong   Y.W. Heo   D.P. Norton  A.F. Hebard
Affiliation:

aDepartment of Materials Science and Engineering, University of Florida, 100 Rhines Hall, P.O. Box 116400, Gainesville, FL 32611, USA

bDepartment of Physics, University of Florida, Gainesville, FL 32611-8440

Abstract:The microstructural properties of secondary phase particles formed in epitaxial CoxTi1−xO2 anatase thin films grown on (0 0 1)LaAlO3 by a reactive RF magnetron co-sputter deposition are examined. These films exhibit ferromagnetic behavior in magnetization measurements, showing a MH loop at room temperature with a saturation magnetization on the order of 0.7 μB /Co. X-ray photoemission spectrometry indicates that the Co cations are in the Co2+ valence state. Cross-section electron microscopy reveals that a significant fraction of the cobalt segregates into Co–Ti–O secondary phase particles. Selected area electron diffraction shows that the secondary phase particles are cobalt-rich anatase. While the cobalt is concentrated in the segregated particles, local energy dispersive spectrometry indicates some Co throughout the film.
Keywords:Sputtering   Semiconductor   Magnetic properties   Microstructure
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