| 用空心阴极光源标定极紫外-软X射线单色仪 |
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| 引用本文： | 王丽辉,李敏,王孝坤,高亮,尼启良,陈波. 用空心阴极光源标定极紫外-软X射线单色仪[J]. 光学技术, 2007, 33(3): 370-372 |
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| 作者姓名： | 王丽辉 李敏 王孝坤 高亮 尼启良 陈波 |
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| 作者单位： | 中国科学院,长春光学精密机械与物理研究所应用光学国家重点实验室,长春,130033;中国科学院,研究生院,北京,100039;中国科学院,长春光学精密机械与物理研究所应用光学国家重点实验室,长春,130033 |
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| 摘 要： | 为了使单色仪在极紫外-软X射线波段准确地进行波长扫描,需要对单色仪进行波长标定。单色仪的所有组件都放置在罗兰圆的圆周上,改变出射狭缝在罗兰圆上的位置,在单色仪的出射狭缝处就可以得到相应波长的单色光。通过测量标准He空心阴极光源的发射光谱,对Mcpherson247单色仪进行波长标定,并对实验结果进行了分析,得出在1~100nm波段内单色仪标定精度为±0.017nm~±0.097nm。
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| 关 键 词： | 单色仪 极紫外 软X射线 空心阴极光源 标定 |
| 文章编号： | 1002-1582(2007)03-0370-03 |
| 收稿时间： | 2006-04-25 |
| 修稿时间： | 2006-04-25 |
Wavelength calibration of EUV and soft X-ray monochromator measured by hollow cathode source |
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| WANG Li-hui,LI Min,WANG Xiao-kun,GAO Liang,NI Qi-liang,CHEN Bo. Wavelength calibration of EUV and soft X-ray monochromator measured by hollow cathode source[J]. Optical Technique, 2007, 33(3): 370-372 |
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| Authors: | WANG Li-hui LI Min WANG Xiao-kun GAO Liang NI Qi-liang CHEN Bo |
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| Abstract: | In order to accurately carry out the wavelength scan,it was proposed to calibrate the wavelength of monochromator. All components of the monochromator were laid on the Rowland circle. The position of the exit slit was changed to obtain the corresponding monochromatic light in the exit slit of the monochromator. Measuring the spectrum of the standard hollow cathode source with He gas,the wavelength of Mcpherson247 was detemined. The analysis of calibration results indicate that the calibration error of the monochromator is ± 0.017nm～± 0.097nm in 1～100nm. |
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| Keywords: | monochromator Euv soft x-ray hollow cathode source calibration |
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