Affiliation: | 1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, str. Institutskaya 6, Chernogolovka, Moscow district, 142432, Russia 2. JSC FOMOS-Materials, str. Buzheninova 16, Moscow, 107023, Russia 3. Institute for Systems Research, Russian Academy of Sciences, Nakhimovskii pr. 36, korp. 1, Moscow, 117218, Russia
|