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Damping of the Growth of Titanium Oxide Nanolayer Formed by Molecular Layer Deposition Technique on Oxidized Silicon Surface |
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| Authors: | Dorofeev V. P. Malygin A. A. Kol'tsov S. I. |
| Affiliation: | (1) St. Petersburg State Technological Institute, St. Petersburg, Russia |
| Abstract: | Ellipsometric data on titanium oxide nanolayers synthesized by molecular layer deposition technique on oxidized Si(100) surface are discussed. |
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