Nanoscale effects in focused ion beam processing |
| |
Authors: | L Frey C Lehrer H Ryssel |
| |
Institution: | (1) Fraunhofer Institute of Integrated Circuits, Device Technology Division, Schottkystr. 10, 91085 Erlangen, Germany, DE;(2) Chair of Electron Devices, University of Erlangen, Cauerstr. 6, 91085 Erlangen, Germany, DE |
| |
Abstract: | Focused ion beams with diameters of 8 to 50 nm are used for material processing in the nanoscale regime. In this paper, effects
of the ion beam–solid interaction determining the formation of small structures by ion-beam sputtering and chemically assisted
material deposition and etching are investigated. In the case of decreasing feature size, angle-dependent sputtering, a non-constant
sputter rate, and scattered ions play an important role. The impact on side-wall angle, aspect ratio, and shape of the bottom
of the etched structures is discussed. In beam tail regions, these effects will be especially pronounced, leading to material
swelling instead of material removal. Ion beam assisted etching and deposition will face additional effects. For small structures,
gas depletion becomes a significant drawback. The impact on gas depletion and the competition with sputtering are discussed.
Received: 21 August 2002 / Accepted: 21 August 2002 / Published online: 12 February 2003
RID="*"
ID="*"Corresponding author. Fax: +49-9131/761360, E-mail: frey@iis-b.fhg.de |
| |
Keywords: | PACS: 61 80 Jh 81 16 Rf |
本文献已被 SpringerLink 等数据库收录! |
|