| Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors |
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| 作者姓名： | 黄辉 张瑞康 王琦 黄永清 任晓敏 |
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| 作者单位： | Beijing University of Posts and Telecommunications，Beijing University of Posts and Telecommunications，Beijing University of Posts and Telecommunications，Beijing University of Posts and Telecommunications，Beijing University of Posts and Telecommunications Beijing 100876，China，Beijing 100876，China，Beijing 100876，China，Beijing 100876，China，Beijing 100876，China |
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| 基金项目： | SupportedbytheNationalNaturalScienceFoundationofChina (699760 0)andNationalOutstandingYoungScientistFoundofChina (6962 51 0 1 ) . |
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| 摘 要： | 1 Ｉｎｔｒｏｄｕｃｔｉｏｎ Ｉｎｒｅｃｅｎｔｙｅａｒｓ ,ｓｉｇｎｉｆｉｃａｎｔｄｅｖｅｌｏｐｍｅｎｔｈａｓｂｅｅｎａｃｈｉｅｖｅｄｆｏｒＷＤＭｏｐｔｉｃａｌｆｉｂｅｒｃｏｍｍｕｎｉｃａｔｉｏｎｓ,ａｎｄｈｉｇｈｐｅｒｆｏｒｍａｎｃｅｐｈｏｔｏｄｅｔｅｃｔｏｒｓｈａｓｂｅｃｏｍｅａｎａｓｓｅｔｗｉｔｈｒｅｇａｒｄｔｏｏｂｔａｉｎｉｎｇａｎａｒｒｏｗｓｐｅｃｔｒａｌｒｅｓｐｏｎｓｅｌｉｎｅｗｉｄｔｈａｎｄｗａｖｅｌｅｎｇｔｈ ｔｕｎａｂｌｅ1,2 ] .Ｔｈｅｒｅｓｏｎａｎｔｃａｖｉｔｙｅｎｈａｎｃｅｄ …
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| 收稿时间： | 2001/8/20 |
Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors |
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| HUANG Hui,ZHANG Ruikang,WANG QiHUANG Yongqing,REN Xiaomin.Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors[J].中国激光(英文版),2002,11(6):440-444. |
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| Authors: | HUANG Hui ZHANG Ruikang WANG QiHUANG Yongqing REN Xiaomin |
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| Abstract: | Research on the one mirror inclined three mirror cavity (OMITMiC) photodetectors in the laboratory is reported. In the structure of photodetectors, it is the inclined mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, wavelength tunable and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis and experimental verification on the principle with separated optical components, the vertical taper structure, the key part in the whole integrated device was realized, by dynamic etch mask technique. Moreover, the first integrated device of this type was fabricated. A spectral linewidth less than 6 nm and a quantum efficiency of 52.6% have been achieved experimentally. |
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| Keywords: | photodetectors wavelength tunable linewidth taper structure |
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