High resolution patterning of sapphire by F2-laser ablation |
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Authors: | Markus Wiesner Jürgen Ihlemann |
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Affiliation: | 1.Laser-Laboratorium G?ttingen,G?ttingen,Germany |
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Abstract: | The ablation behavior of single crystalline sapphire with nanosecond laser pulses at 157 nm wavelength is investigated. Ablation rates of about 10 to 100 nm/pulse are obtained at fluences ranging from 1 to 9 J/cm2. At moderate fluences, incubation behavior is observed, i.e. ablation starts after material modification by a number of laser pulses. The ablation can be utilized to fabricate sapphire micro-optics. The capability of creating lenses or gratings on the tip of sapphire fibers is demonstrated. Multilevel diffractive optical elements and high resolution gratings with 1 μm period are fabricated on planar sapphire substrates. |
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