Using a micro-molding process to fabricate polymeric wavelength filters |
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| Authors: | Wei-Ching Chuang An-Chen Lee Chi-Ting Ho |
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| Institution: | 1. Department of Electro-Optics Engineering, National Formosa University, Huwei 632, Yulin, Taiwan;2. Department of Mechanical Design Engineering, National Formosa University, 64 Wen Hua Road, Huwei 632, Yulin, Taiwan;3. Department of Mechanical Engineering, National Chiao-Tung University, Hsinchu 300, Taiwan;1. Dipartimento di Energia and NEMAS – Center for NanoEngineered Materials and Surfaces, Politecnico di Milano, Via Ponzio 34/3, 20133 Milano, Italy;2. Center for Nano Science and Technology @Polimi, Istituto Italiano di Tecnologia, Via Pascoli 70/3, 20133 Milano, Italy;3. CSIR - National Physical Laboratory, New Delhi 110012, India;1. Department of Physics, Center for Functional Nanomateriels and Devices, East China Normal University, Shanghai 200241, PR China;2. Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050, PR China;3. State Key Laboratory of Estuarine and Coastal Research, East China Normal University, Shanghai 200062, PR China;1. UFMA, CCSST, GPCM, LEOF, Imperatriz, MA, Brazil;2. São Carlos Institute of Physics, IFSC/USP, São Carlos, SP, Brazil |
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| Abstract: | A procedure for fabricating a high aspect ratio periodic structure on a UV polymer at submicron order using holographic interferometry and molding processes is described. First, holographic interferometry using a He–Cd (325 nm) laser was used to create the master of the periodic line structure on an i-line sub-micron positive photoresist film. A 20 nm nickel thin film was then sputtered on the photoresist. The final line pattern on a UV polymer was obtained from casting against the master mold. Finally, a SU8 polymer was spun on the polymer grating to form a planar waveguide or a channel waveguide. The measurement results show that the waveguide length could be reduced for the waveguide having gratings with a high aspect ratio. |
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