| 新型大气压微波等离子体炬的仿真研究 |
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| 引用本文： | 陈颖,李承跃,季天仁.新型大气压微波等离子体炬的仿真研究[J].强激光与粒子束,2011,23(10). |
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| 作者姓名： | 陈颖 李承跃 季天仁 |
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| 作者单位： | 1. 电子科技大学 物理电子学院， 成都 610054， 2. 成都纽曼和瑞微波技术有限公司， 成都 610052 |
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| 摘 要： | 设计了一种新型的大气压微波等离子体炬结构。入射主频为2 450 MHz，基于HFSS软件对其进行了仿真研究。在仿真过程中，对该结构的各个参数进行了优化，并得出对场强分布的影响规律。结果表明，探针的使用对腔内场分布有很大影响。根据优化参数对微波等离子体炬进行了仿真模拟，在等离子体发生腔产生了高幅值的电场强度，品质因数达到2×104，可以在大气压下激发等离子体。
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| 关 键 词： | 微波等离子体炬 大气压 HFSS软件 探针 电场强度 |
| 收稿时间： | 1900-01-01; |
Simulation study on atmospheric pressure microwave plasma torch |
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| Chen Ying,Li Chengyue,Ji Tianren.Simulation study on atmospheric pressure microwave plasma torch[J].High Power Laser and Particle Beams,2011,23(10). |
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| Authors: | Chen Ying Li Chengyue Ji Tianren |
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| Institution: | (1. School of Physical Electronics， University of Electronic Science and Technology of China， Chengdu 610054， China; 2. Chengdu Newman-Hueray Microwave Tech Co Ltd, Chengdu 610052, China) |
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| Abstract: | An atmospheric pressure microwave plasma torch(MPT) operating at 2.45 GHz was designed.Corresponding simulation based on HFSS code was performed and the influences of structure parameters on the E-field distribution in the device were analyzed.The results indicate that the use of coupling probe will have a distinct impact on the field distribution in the device.A MPT with strong electric field amplitude and high Q-factor about 20 000 was achieved in simulation by adjusting the structure parameters,which cou... |
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| Keywords: | microwave plasma torch atmospheric pressure HFSS code probe electric field strength |
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