Collimation Characteristics of Planar Microlens for Parallel Optical Interconnect

We evaluated the collimated beam quality of a planar microlens (PML) for parallel optical interconnect systems. It has been confirmed that the divergence beam from a single mode fiber was collimated by single PML and propagated with good beam quality by about 10 mm, which is the nominal length of microoptics components considered. The divergence beam from a vertical cavity surface emitting laser was collimated using stacked PML and the collimated beam width of 100 μm was obtained. The collimated beam profile was good enough for low loss beam interconnect in a micro-optical bench scheme.