Computer simulation of back sputtering and ion penetration into polycrystalline targets |
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| Authors: | Shanta R |
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| Affiliation: | (1) Department of Physics, Indian Institute of Technology, 400 076 Bombay;(2) Present address: Physics Department, Bhavan’s College, 400 058 Bombay |
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| Abstract: | Pramana - In the present work computer simultations of the back sputtering of low energy neon ions with low impact parameter and the penetration of the same for higher values of the impact... |
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| Keywords: | Computer simulation back sputtering ion penetration |
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