Structure,Composition, Mechanical,and Tribological Properties of BCN Films Deposited by Plasma Enhanced Chemical Vapor Deposition |
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Authors: | D?Kurapov Email author" target="_blank">J?M?SchneiderEmail author |
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Institution: | (1) Materials Chemistry, RWTH Aachen, D-52056 Aachen, Germany |
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Abstract: | In this work thin BCN films were deposited by plasma enhanced chemical vapor deposition (PECVD) using chloridic precursors.
Through adjusting the BCl3 content in the inlet gas mixture the chemical composition of the deposited films was changed from carbon rich to boron rich.
Based on optical emission spectroscopy (OES) measurements, a correlation between film composition and precursor species concentration
in the plasma was established. The films were amorphous as detected by grazing incidence X-ray diffraction (GIXRD). The hardness and the elastic modulus have maximal values of 25.5±1.2 and 191±6 GPa, respectively,
for the films with a boron concentration of 45.2 at.%. GIXRD data suggest that a depletion in boron content may initiate the
formation of graphitic domains in the amorphous matrix. The observed degradation of the mechanical properties is associated
with the graphitization. The tribological behavior was studied with a tribometer operated in pin-on-plate configuration at
the temperatures 25 and 400°C. The wear mechanisms were discussed with respect to the formation of a boric acid surface layer
which was detected by reflection electron energy loss spectroscopy (REELS) analysis. |
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Keywords: | BCN PECVD OES plasma analysis mechanical properties wear |
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