Preparation and Characterization of (Ba,Ca)(Ti,Zr)O3 Thin Films Through Sol-Gel Processing |
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| Authors: | Toyoda Masahiro Lubis Muhamm Yusuf Sahriza |
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| Affiliation: | (1) Chemistry and Biology Engineering, Fukui National College of Technology, Geshi, Sabae, Fukui, 916-8507, Japan |
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| Abstract: | (Ba0.92,Ca0.08)(Ti0.92,Zr0.08)O3 thin films were prepared from Ba-Ti and Ca-Zr precursors by sol-gel processing. Polymerizable solutions containing Ba-Ti and Ca-Zr, respectively, were newly synthesized. Decomposition of the starting compounds and crystallization behavior of the film were examined by using TG/DTA and XRD. Microstructure of thin films was observed by using SEM. Polycrystalline (Ba0.92,Ca0.08)(Ti0.92, Zr0.08)O3 films obtained by firing at 800°C were dense with fine grains. The thin films showed a dielectric constant of 1200 and dielectric loss of 0.5%. |
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| Keywords: | sol-gel (Ba,Ca)(Ti,Zr)O3 thin films dielectric constant dielectric loss |
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