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Effect of fluorine on the electrical conductivity of amorphous Si |
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| Authors: | Nguyen van Dong C. Thuault |
| Affiliation: | Département de Physico-Chimie, Centre D''Etudes Nucléaires de Saclay, 91190 Gif-sur-Yvette, France |
| Abstract: | We report the effect of fluorine on the dc electrical conductivity of amorphous Si films prepared by cathodic sputtering. |
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