Cross sections for K-shell ionization of Si and Ar by 4 keV to 10 keV electron impact

K-Auger electron emission of Si and Ar produced by 4 keV to 10 keV electrons was measured. Absolute yields were obtained by normalizing to the elastically scattered primary electrons. From the yields cross sections for K-shell ionization were deduced. The cross sections are in good agreement with the results of a fit formula for K-shell excitation in the whole range measured, while they agree with results of PWBA calculations including electron exchange in the Ochkur approximation only for the higher impact energies.