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Controllable electrochemical-magnetorheological finishing of single-crystal gallium nitride wafers |
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| Authors: | Yan Jiewen Pan Jisheng Yan Qiusheng Zhou Rui Wu Yusen |
| Affiliation: | 1.School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou Higher Education Mega Center, No. 100 Waihuan Xi Road, Panyu District, Guangzhou, 510006, China ;2.Guangzhou Institute of Measurement and Testing Technology, No. 19 Jiantashan Road, Science CityHuangpu District, 510663, China ; |
| Abstract: | Journal of Solid State Electrochemistry - Electrochemical magnetorheological finishing (EC–MRF) is an ultrasmooth planarization method that etches a workpiece surface with a controllable... |
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