微变形镜补偿激光器腔内热畸变的研究

大功率激光器中由增益介质热畸变产生热透镜效应,导致激光器的性能下降.采用基于MEMS技术加工的微变形反射镜作为激光器谐振腔的一部分,能实时补偿热透镜效应,提高激光器的输出功率.推导了热畸变与微变形镜镜面形变量、反射镜驱动单元上电压的关系并进行了实验.实验结果表明,在初始功率为287 mW、383 mW、482 mW和800 mW的情况下使用微变形镜进行补偿,可以将功率提高到437 mW、710 mW、894 mW和993 mW,在理论和实验上证明了使用微变形镜可以改善激光器腔内热畸变.

Compensation of the Thermal Aberrations in Laser Resonators Through MEMS-DMs

The thermal lens effect in a high-power laser is produced by thermal aberration in the gain media, which makes the perforrnance bad. The thermal lens effect can be compensated in real-time by using MEMS-DMs as portion of laser resonators to improve output power. The relationships between thermal aberration and the deflection of the MEMS-DMs, thermal aberration, the voltage of MEMS-DMs poles are deduced. The experimental results show that when the MEMS-DMs is used during compensation the power can be improved to437 mW, 710 mW, 894 mW and 993 mW with the initial laser power of 287 mW, 383 mW, 482 mW and 800 mW. Both the theory and experimental results show that the thermal aberration in laser resonators can be compensated by means of MEMS-DMs.